Chemical Equipment
Canister Process Solution
Canister Process Solution
A comprehensive process solution encompassing the entire canister lifecycle, from advanced cleaning to precise measurement.
Key Features
- Enhanced Productivity: Our automated robotic system maximizes operational throughput with minimal manpower compared to manual processes. [ Manpower Requirement — Manual: 4–6 operators | System-Automated: 1–2 operators ]
- Uncompromised Operator Safety: Integrated with PLC & PC-based controls and rigorous interlocking systems, our solution ensures ultimate operational reliability. It significantly mitigates workplace hazards, preventing chemical exposure and musculoskeletal disorders caused by handling heavy canisters.
- High-Quality Process Precision: Combining advanced chemical wet cleaning with optimized purge cycles, this system delivers advanced contamination control. By achieving a level of precision and sophistication unattainable through manual labor, it minimizes defects, impurities, and particle generation.
- Tailored Customization: Engineered to adapt to diverse manufacturing environments, our system supports both Central Chemical Supply Systems (CCSS) and Local Chemical Supply Systems (LCSS). We provide end-to-end services—from optimal design and fabrication to seamless installation—custom-tailored to your unique process specifications and operator workflows.
Application Fields
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Semiconductor Deposition: Removal of residual precursors inside canisters used in semiconductor deposition.
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Secondary Battery Manufacturing: Comprehensive canister cleaning for electrolytes, additives, and chemical agents.
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Quality & Integrity Inspection: Quantitative analysis of trace moisture/particles and rigorous hermeticity testing.
Main Products
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OrionCleanTM
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NeptuneCleanTM
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VegaCleanTM
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AtlasCleanTM
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LibraCoreTM
