Chemical Equipment

Canister Process Solution

A comprehensive process solution encompassing the entire canister lifecycle, from advanced cleaning to precise measurement.

Key Features

  • Enhanced Productivity: Our automated robotic system maximizes operational throughput with minimal manpower compared to manual processes. [ Manpower Requirement — Manual: 4–6 operators | System-Automated: 1–2 operators ]
  • Uncompromised Operator Safety: Integrated with PLC & PC-based controls and rigorous interlocking systems, our solution ensures ultimate operational reliability. It significantly mitigates workplace hazards, preventing chemical exposure and musculoskeletal disorders caused by handling heavy canisters.
  • High-Quality Process Precision: Combining advanced chemical wet cleaning with optimized purge cycles, this system delivers advanced contamination control. By achieving a level of precision and sophistication unattainable through manual labor, it minimizes defects, impurities, and particle generation.
  • Tailored Customization: Engineered to adapt to diverse manufacturing environments, our system supports both Central Chemical Supply Systems (CCSS) and Local Chemical Supply Systems (LCSS). We provide end-to-end services—from optimal design and fabrication to seamless installation—custom-tailored to your unique process specifications and operator workflows.

Application Fields

  • Semiconductor Deposition: Removal of residual precursors inside canisters used in semiconductor deposition.
  • Secondary Battery Manufacturing: Comprehensive canister cleaning for electrolytes, additives, and chemical agents.
  • Quality & Integrity Inspection: Quantitative analysis of trace moisture/particles and rigorous hermeticity testing.

Main Products

  • OrionCleanTM

  • NeptuneCleanTM

  • VegaCleanTM

  • AtlasCleanTM

  • LibraCoreTM