Detection & Control Components

Temperature Control Unit

As the official distributor of KELK in South Korea, we provide high-precision temperature control solutions backed by exclusive technical support. In response to the rapid technological advancements in semiconductor manufacturing, we supply state-of-the-art temperature control systems that integrate KELK’s world-class thermal analysis, regulation, and electronic circuit design technologies. Through close partnership from the initial stages of equipment development, we propose optimized concepts tailored to each specific process. We maximize the value of our customers' equipment with thoroughly proven uptime, exceptional performance, and uncompromised reliability.

Key Features

  • Unrivaled Temperature Precision via In-House Peltier Technology (±0.01℃ Control): KELK stands as a world-class pioneer with complete vertical integration, spanning from raw thermoelectric module (Peltier) source technology to finished assemblies. This architecture achieves exceptionally fast thermal response within a compact footprint, maximizing semiconductor wafer yields through ultra-precise temperature regulation at ±0.01℃.

  • Three-in-One Synergy of Thermal Analysis, Control Logic, and Circuit Design: Moving far beyond simple component assembly, KELK provides a fully integrated solution fusing simulation-driven thermal analysis, optimized parameter-seeking control algorithms, and highly reliable electronic circuit designs. This cohesive engineering approach maintains a rock-solid, uniform temperature profile even under the most severe process fluctuations.

  • Tailored Co-Development Partnerships from the Initial R&D Stage: Rather than simply supplying off-the-shelf products, KELK actively participates from the earliest development phases of global semiconductor original equipment manufacturers (OEMs). By co-proposing customized thermal management concepts that meticulously factor in internal heat flows and spatial constraints, we elevate the overall performance and completeness of our customers' next-generation systems.

  • Rigorous Durability and Global Reliability Backed by KOMATSU Group Standards: Every unit is manufactured under the uncompromising quality assurance standards of the KOMATSU Group, a world-renowned leader in heavy industrial and precision machinery. This ensures minimized equipment downtime within high-volume 24/7 semiconductor mass production lines, while guaranteeing long-term compatibility and an unmatched product lifespan.

Main Products

  • Chemical Circulator (Direct Circulation Isothermal System for Chemical Liquids)

  • CS Heater (Compact In-line Chemical Heater)

  • Hot DIW Unit (Ultra-Pure DI-Water Heater)

  • Chemical Heater (Direct Circulation Resistance Heating System for Chemical Liquids)