A hot water supply system for ultra-pure water that is ideally suited for point-of-use for rinsing of silicon wafers and glass substrates of liquid crystal displays.
DI-Water Heater heats purified water used to rinse silicon wafers in the manufacture of semiconductor and glass substrates in the manufacture of LCDs. The halogen lamps are housed in transparent, double-waIled high-purity quartz glass tubes to ensure efficient and contaminant free
heating of ultral-pure water. The slim, compact design minimizes foot point for installation at the point of use.
Heating Capability Diagram
Model photograph
Specifications