· Wet equipment applicable to various processes on Panel surface
· Panel Size : 6G ~ 8G
· Process Direction : Roller (Horizontal & Tilting)
: Single & Dual type Air knife
· Chemical Supply : CCSS or LCSS type
· Control method : PC or PLC control
Application field
- - ITO Etcher
- - Initial Cleaner
- - Develop
- - Pre PI Cleaner
- - Pre Depo Cleaner
- - DI Docking